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Ultra-high vacuum gate valve (UHV)

Ultra-high vacuum gate valve (UHV)

Plasma Dual-Chamber Wet

Plasma Dual-Chamber Wet

Combustion Wet Scrubber

Combustion Wet Scrubber

Single-chamber design using natural gas combustion, with 4 inlets supporting multiple process connections and a maximum processing capacity of 600 slm

APC combination valve

APC combination valve

Proportional control valve

Proportional control valve

Butterfly valve - non-sealed heating version

Butterfly valve - non-sealed heating version

Plasma Wet

<p style="margin-top:0em;margin-bottom:0em;TEXT-INDENT:2em;LETTER-SPACING:0em;"><span style="line-height:2;"><span style="font-size:16px;">Plasma Wet tail gas treatment equipment is a specialised exhaust gas treatment system to deal with toxic gases, through the DC power supply excitation of high purity N<sub>2</sub>, generating plasma and high temperature, combined with high temperature plasma decomposition and water dissolution process, the exhaust gas produced by the process through the high temperature treatment of the reaction chamber, reaction to powder or dissolved in water, and then discharged to the plant through the filtration process of the treatment system, the processed exhaust gas, including most of the special gases used in semiconductor plants and solar plants, such as SIH<sub>4</sub>, NH<sub>3</sub>, B<sub>2</sub>H<sub>6</sub>, H<sub>2</sub>, PH<sub>3</sub>, CH<sub>4</sub>, NF<sub>3</sub>, TMB, N<sub>2</sub>O, etc.. The processed gases include most of the special gases used in semiconductor and solar energy plants, such as SIH<sub>4</sub>, NH<sub>3</sub>, B<sub>2</sub>H<sub>6</sub>, H<sub>2</sub>, PH<sub>3</sub>, CH<sub>4</sub>, NF<sub>3</sub>, TMB, N<sub>2</sub>O, and so on. For other flammable and explosive gases, toxic gases and water-soluble gases, the plasma series equipment also has excellent processing efficiency, which has been proved by the market.</span></span></p>

Thermal Wet

<p style="margin-top:0em;margin-bottom:0em;TEXT-INDENT:2em;LETTER-SPACING:0em;"><span style="line-height:2;"><span style="font-size:16px;">Thermal Wet of the electrically heated water-washed exhaust gas treatment equipment is to heat the exhaust gases (DCS, NO, SiH<sub>4</sub>, NH<sub>3</sub>, TEOS, SiF<sub>4</sub>, CH<sub>4</sub>, TEB, TEPO, etc.) generated in the process by means of electrical energy, so that they decompose at high temperatures in the reaction chamber. The equipment converts electrical energy into thermal energy by means of an electric heating element, which rapidly increases the temperature of the tail gas. When the exhaust gas is heated to a certain temperature, the harmful substances in it begin to decompose, and through the adsorption and dissolution of water, the harmful substances in the exhaust gas are effectively treated. Advantages:High efficiency, environmental protection, easy maintenance. The electric heating element has a high thermal efficiency, can convert electric energy into heat energy, so that the temperature of the exhaust gas rises rapidly. The structure of the equipment is simple, easy to maintain and repair.</span></span></p>

Wet

Wet tail gas treatment equipment consists of a cabinet, a transparent PVC box, Pall rings, a circulating water pump, pipes and valves, etc. The lower part of the PVC box is a water storage tank, and the upper processing section is divided into multiple compartments, which serve as the tail gas washing area.

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SoAo Global Co., Ltd

苏ICP备2025160339号-1

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Business License

Address: Building B4, Taihu Bay Information Technology Industrial Park, No. 688, Zhenze Road, Economic Development Zone, Wuxi, Jiangsu Province

Tel: 0510-81585888

Email: public@soao.com.cn

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