Model: SABW-600

Single-chamber design using natural gas combustion, with 4 inlets supporting multiple process connections and a maximum processing capacity of 600 slm

Design and Performance

1. All-New System Design

-Unique natural gas combustion reaction chamber, bypass pipeline, and excellent water circulation system

2. Combustion Reaction Chamber

-The thermal reaction chamber mixes and combusts the exhaust gases from the process gas together with the fuel and oxidant.

3. High Safety

-Comprehensive safety interlock system and PLC safety interlock system.

4. Low Purchase Cost / Operating Cost

-Optimized system structure and layout to achieve a smaller footprint.

Combustion Wet Scrubber

Equipment Model

SABW-600

Processing Capacity

600 LPM

Equipment Dimensions

850*850*1800

Equipment Weight

380 kg

Input Power Supply

380 VAC, 3 Phase, 50 Hz

Average Power

-

Application Processes

PECVD, CVD, ALD, PE-POLY, LED