About Us

SoAo Global Co., Ltd  is a Sino-South Korean joint venture located in Building B4 of Taihu Bay Information Technology Industrial Park in the Economic Development Zone. The company covers an area of 4700 square meters and mainly engages in the research, development, production, and sales of core equipment and components in the semiconductor field. It has currently established two major R&D centers for semiconductor tail gas treatment equipment and semiconductor vacuum valves. The company actively responds to the national strategy for the independent development of the semiconductor supply chain and strives to become a "specialized, sophisticated, and new" enterprise in the domestic vacuum valve and tail gas treatment equipment fields, achieving the domestic substitution of core semiconductor components.

SoAo VTS Co., Ltd —Specializes in the research, development, production, and sales of APC vacuum valves in the general semiconductor field. In cooperation with a South Korea's company, we aim to accelerate the implementation and construction of a localized production line for vacuum valves. we has established a research and development center in Taihu Bay Park to promote the research and development and production of China's semiconductor vacuum valves.

SoAo VTS Co., Ltd —Its main products are tail gas treatment equipment used in the general semiconductor field. The technical team members have more than 15 years of experience in tail gas treatment in the general semiconductor field and focus on the research and development and design of waste gas treatment equipment. Four series of products have been developed: plasma washing equipment, electric heating washing equipment, dry adsorption equipment, and washing equipment.