Drive Type

Manual / Pneumatic

Dimensions

DN63 ... DN320

Flange Type

ISO, JIS, ASA, CF

Feedthrough

Welded bellows seal or O-ring seal

Valve Plate Seal

Viton O-Ring / Kalrez O-Ring / EPDM

Bonnet Seal

Viton O-Ring / Cu Gasket

Response Time

≤5 s (DN63-DN100), ≤6 s (DN120-DN200), ≤8 s (DN250-DN320)

Operating Pressure Range

DN63-200: 1×E-10 mbar to 1600 mbar; DN250-320: 1×E-10 mbar to 1200 mbar

Opening Differential Pressure

≤ 30mbar

Valve Plate Differential Pressure

DN63-200: ≤1600 mbar; DN250-320: ≤1200 mbar

Leak Rate

Valve body: <5×10-10 mbar·L/s;

valve seat: <1×10-9 mbar·L/s

Number of Cycles Before First Maintenance

50,000

Valve Body Temperature

≤250°C

Actuator Temperature

≤150°C

Position Indicator Temperature

≤150°C

Bake-Out Temperature

≤200°C

Material

Valve body: (SUS304/316L); actuator: (6061-T651)

Installation Location

Any (no restriction)

Operating Pressure (N2)

4-7 bar