Technical Specifications (Valve)

Item

Unit

Specification

Valve Interface Size

mm (Φ)

NW100

Overall Dimension

mm(W)×mm(H)

179×443

Valve Body Size

mm (Φ)

158

Material of Internal Parts

Valve Body

SUS316L

Bellows

SUS316L

Valve Plate

SUS316L

Flange

SUS316L

Durability

×10⁶ Cycles

1.5

Conductance (N₂ Flow 30SLM)

L/s

15,000

Weight

kg

27

Sealing O-Ring Material

FFKM (Kalrez, DUPRA, etc.)

Working Pressure Range

Pa

1.3×10⁻⁶ ~ 1.0×10⁵

Control Air Pressure

MPa

0.5±0.05

Total Stroke

mm

44

Control Stroke

mm

40

Heater

Material

Internal

SUS (Cartridge Heater)

External

PTFE Fiber

Heating Ring

PTFE Fiber

Thermostat Setting

℃

250±10

Thermocouple Type

Type

K

Rated Voltage

VAC

208

Maximum Temperature

Internal

   ℃

200

External

200

Heating Ring

200

Full Open Time

sec

<0.5

Full Close Time

sec

<0.5

Quick Close Time

sec

<0.5

Valve Seat Leakage Rate

Pa·m³/s

1.3×10⁻⁹

Technical Specifications (Controller)

Item

Unit

Specification

Overall Dimension

mm(W)×mm(D)×mm(H)

311×141×72.5

Input Power Supply

VDC

24±10%

Control Method

PIDA

Communication Protocol

EtherCAT

Vacuum Gauge Interfaces

EA

3

Connectors

Power Supply

D-Sub DA-9 (Male)

Control Valve

D-Sub DA-25 (Male)

Pressure Sensor

3×D-Sub DA-15 (Female)

Remote I/O

D-Sub DA-15 (Male)

Communication

2×RJ-45