Plasma Wet
Plasma Wet tail gas treatment equipment is a specialised exhaust gas treatment system to deal with toxic gases, through the DC power supply excitation of high purity N2, generating plasma and high temperature, combined with high temperature plasma decomposition and water dissolution process, the exhaust gas produced by the process through the high temperature treatment of the reaction chamber, reaction to powder or dissolved in water, and then discharged to the plant through the filtration process of the treatment system, the processed exhaust gas, including most of the special gases used in semiconductor plants and solar plants, such as SIH4, NH3, B2H6, H2, PH3, CH4, NF3, TMB, N2O, etc.. The processed gases include most of the special gases used in semiconductor and solar energy plants, such as SIH4, NH3, B2H6, H2, PH3, CH4, NF3, TMB, N2O, and so on. For other flammable and explosive gases, toxic gases and water-soluble gases, the plasma series equipment also has excellent processing efficiency, which has been proved by the market.
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Product Description
Product Parameters
Plasma Wet tail gas treatment equipment is a specialised exhaust gas treatment system to deal with toxic gases, through the DC power supply excitation of high purity N2, generating plasma and high temperature, combined with high temperature plasma decomposition and water dissolution process, the exhaust gas produced by the process through the high temperature treatment of the reaction chamber, reaction to powder or dissolved in water, and then discharged to the plant through the filtration process of the treatment system, the processed exhaust gas, including most of the special gases used in semiconductor plants and solar plants, such as SIH4, NH3, B2H6, H2, PH3, CH4, NF3, TMB, N2O, etc.. The processed gases include most of the special gases used in semiconductor and solar energy plants, such as SIH4, NH3, B2H6, H2, PH3, CH4, NF3, TMB, N2O, and so on. For other flammable and explosive gases, toxic gases and water-soluble gases, the plasma series equipment also has excellent processing efficiency, which has been proved by the market.
Applicable Industries: SEMI, SOLAR, LED, etc.
| Process Principle | Plasma Wet |
| Equipment Model | SAPW-3000, SAPW-1500 |
| Processing Capacity | 1000-3000 LPM |
| Equipment Size | 1200W*1200D*2000H mm |
| Equipment Weight | Net weight: approximately 850kg |
| Power Specification | AC380V, 3Phase, 50Hz |
| Average Power | 8-10 KW |
| Applied Processes | PECVD, CVD, ALD, PE-POLY, HJT |
Address: Building B4, Taihu Bay Information Technology Industrial Park, No. 688, Zhenze Road, Economic Development Zone, Wuxi, Jiangsu Province
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