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  • Plasma Wet

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Plasma Dual-Chamber Wet

Plasma Dual-Chamber Wet

Plasma Wet

Plasma Wet

<p style="margin-top:0em;margin-bottom:0em;TEXT-INDENT:2em;LETTER-SPACING:0em;"><span style="line-height:2;"><span style="font-size:16px;">Plasma Wet tail gas treatment equipment is a specialised exhaust gas treatment system to deal with toxic gases, through the DC power supply excitation of high purity N<sub>2</sub>, generating plasma and high temperature, combined with high temperature plasma decomposition and water dissolution process, the exhaust gas produced by the process through the high temperature treatment of the reaction chamber, reaction to powder or dissolved in water, and then discharged to the plant through the filtration process of the treatment system, the processed exhaust gas, including most of the special gases used in semiconductor plants and solar plants, such as SIH<sub>4</sub>, NH<sub>3</sub>, B<sub>2</sub>H<sub>6</sub>, H<sub>2</sub>, PH<sub>3</sub>, CH<sub>4</sub>, NF<sub>3</sub>, TMB, N<sub>2</sub>O, etc.. The processed gases include most of the special gases used in semiconductor and solar energy plants, such as SIH<sub>4</sub>, NH<sub>3</sub>, B<sub>2</sub>H<sub>6</sub>, H<sub>2</sub>, PH<sub>3</sub>, CH<sub>4</sub>, NF<sub>3</sub>, TMB, N<sub>2</sub>O, and so on. For other flammable and explosive gases, toxic gases and water-soluble gases, the plasma series equipment also has excellent processing efficiency, which has been proved by the market.</span></span></p>

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SoAo Global Co., Ltd

苏ICP备2025160339号-1

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Address: Building B4, Taihu Bay Information Technology Industrial Park, No. 688, Zhenze Road, Economic Development Zone, Wuxi, Jiangsu Province

Tel: 0510-81585888

Email: public@soao.com.cn

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