Thermal Wet
Thermal Wet of the electrically heated water-washed exhaust gas treatment equipment is to heat the exhaust gases (DCS, NO, SiH4, NH3, TEOS, SiF4, CH4, TEB, TEPO, etc.) generated in the process by means of electrical energy, so that they decompose at high temperatures in the reaction chamber. The equipment converts electrical energy into thermal energy by means of an electric heating element, which rapidly increases the temperature of the tail gas. When the exhaust gas is heated to a certain temperature, the harmful substances in it begin to decompose, and through the adsorption and dissolution of water, the harmful substances in the exhaust gas are effectively treated. Advantages:High efficiency, environmental protection, easy maintenance. The electric heating element has a high thermal efficiency, can convert electric energy into heat energy, so that the temperature of the exhaust gas rises rapidly. The structure of the equipment is simple, easy to maintain and repair.
Category:
Product Description
Product Parameters
Thermal Wet of the electrically heated water-washed exhaust gas treatment equipment is to heat the exhaust gases (DCS, NO, SiH4, NH3, TEOS, SiF4, CH4, TEB, TEPO, etc.) generated in the process by means of electrical energy, so that they decompose at high temperatures in the reaction chamber. The equipment converts electrical energy into thermal energy by means of an electric heating element, which rapidly increases the temperature of the tail gas. When the exhaust gas is heated to a certain temperature, the harmful substances in it begin to decompose, and through the adsorption and dissolution of water, the harmful substances in the exhaust gas are effectively treated. Advantages:High efficiency, environmental protection, easy maintenance. The electric heating element has a high thermal efficiency, can convert electric energy into heat energy, so that the temperature of the exhaust gas rises rapidly. The structure of the equipment is simple, easy to maintain and repair.
Applicable Industries: SEMI, SOLAR, TFT, LED, etc.
| Process Principle | Thermal Wet |
| Equipment Model | SATW-600 |
| Processing Capacity | 600LPM |
| Equipment Size | 850*850*2100 mm |
| Equipment Weight | Approximately 400 kg |
| Power Specification | AC380V, 3Phase, 50Hz |
| Average Power | 8 kw |
| Applied Processes | PECVD, CVD, ALD, PE-POLY |
| Reaction Type | ||
| Exhaust Gas Inlet | SUS304(stainless steel),KF40 Flang2-4inlets Inlet pressure sensor: Inlet pressure monitoring, range ±500mmH2O |
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| Heating Element | SUS316L10 (Stainless Steel) | |
| Cooling | Air Vent: Prevents blockage of dust and prevents corrosion from moisture Polytetrafluoroethylene (PTFE) Coating Cooling Water Tank: Prevents blockage |
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| Washing Tower | Recirculating Water Spray: Treats gases and powders PVC Material |
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| Exhaust Outlet | NW100 ~ NW160flange Temperature Sensor: Exhaust Gas Temperature Monitoring Pressure Sensor: Exhaust Pressure Monitoring, Range ±500mmH2O Pipe end: prevents water mist emission |
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| Circulation System | Circulation pump: water from the tank to the humidity tower, cooling room Water level sensor: Floating sensor (low low, low, high, high high) |
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| Drainage System | Power Drain: Discharge of water by drain pump and water level sensor for overflows When draining cannot be completed |
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| Control and Display | Color Touch Screen & PLC | |
Address: Building B4, Taihu Bay Information Technology Industrial Park, No. 688, Zhenze Road, Economic Development Zone, Wuxi, Jiangsu Province
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