Drive Type

Manual / Pneumatic

Dimensions

DN63 ... DN320

Flange Type

ISO, JIS, ASA, CF

Feedthrough

Welded Bellows Type

Valve Plate Seal

Viton O-Ring / Kalrez O-Ring / EPDM

Bonnet Seal

Viton O-Ring

Response Time

≤1.5 s (DN63-DN100), ≤4 s (DN120-DN200), ≤6 s (DN250-DN320)

Operating Pressure Range

DN63-200: 1×1E-10 mbar to 1600 mbar; DN250-320: 1×1E-10 mbar to 1200 mbar

Opening Differential Pressure

≤ 30mbar

Valve Plate Differential Pressure

DN63-200: ≤1600 mbar; DN250-320: ≤1200 mbar

Leak Rate

Valve body: <5×10-10 mbar·L/s;

valve seat: <1×10-9 mbar·L/s

Number of Cycles Before First Maintenance

50,000

Valve Body Temperature

≤200°C

Actuator Temperature

≤60°C

Bake-Out Temperature

≤150°C

Material

Valve body (SS304 or 316L); actuator (6061-T651)

Installation Location

Any (no restriction)

Operating Pressure (N2)

4-7 bar