Product Description
|
Plasma Dual-Chamber Wet Scrubber |
|
|
Equipment Model |
SAPW-600D |
|
Processing Capacity |
600 LPM * 2 |
|
Equipment Dimensions |
1600*850*1800 |
|
Equipment Weight |
700 kg |
|
Input Power Supply |
380 VAC, 3 Phase, 50 Hz |
|
Average Power |
15 Kw |
|
Application Processes |
PECVD, CVD, ALD, PE-POLY, LED |