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Plasma Dual-Chamber Wet

Category:

Product Description

 

Plasma Dual-Chamber Wet Scrubber

Equipment Model

SAPW-600D

Processing Capacity

600 LPM * 2

Equipment Dimensions

1600*850*1800

Equipment Weight

700 kg

Input Power Supply

380 VAC, 3 Phase, 50 Hz

Average Power

15 Kw

Application Processes

PECVD, CVD, ALD, PE-POLY, LED