High-Flow Hydrogen-Specific Scrubber
Larger hydrogen processing flow: hydrogen alone can reach 400/L, and mixed specialty gas processing capacity can reach 600/L. Plasma high-temperature processing method, with temperatures reaching above 3000°C.
Category:
Product Description
| Introduction | Details |
|---|---|
| Applicable industries | SEMI, TFT, SOLAR, etc. |
| Features | Handles a larger hydrogen flow; single-chamber hydrogen flow up to 400/L Low maintenance cost |
| Applicable processes | TF, DIFF, ETCH, IMP, EPI, etc. |
Business License
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