About Us

SoAo Global Co., Ltd. is a Sino-Korean joint venture, located in Building B4, Taihu Bay Information Technology Industrial Park, Economic Development Zone, the company covers an area of 4700 square meters, mainly engaged in the research and development, production and sales of core equipment and components in the semiconductor field. At present, the company has laid out two research and development centers of semiconductor exhaust gas treatment equipment and semiconductor vacuum valve. The company actively responds to the national supply chain autonomy strategy in the semiconductor field, and strives to become a "specialized and new" enterprise in the field of domestic vacuum valve and exhaust gas treatment equipment, and realizes the localization of semiconductor core components.

SoAo VTS Co., Ltd., a holding subsidiary, specializes in the R&D, production and sales of APC vacuum valves in the pan-semiconductor field, and cooperates with NOVASEN, Korea, aiming to complete the production plant of domestic vacuum valves in China, and set up a R&D center in Taihu Bay Park to help the R&D and production process of semiconductor vacuum valves in China.

Another holding subsidiary, SoAo STS Co., Ltd., mainly produces exhaust gas treatment equipment used in the field of pan-semiconductor. The technical team members have more than 15 years of exhaust gas treatment experience in the field of pan-semiconductor, focusing on the development and design of exhaust gas treatment equipment. At present, we have completed the research and development of 4 series of products: plasma washing equipment, electric heating washing equipment, dry adsorption equipment and washing equipment.