Drive Type

Pneumatic double-acting L-motion lift-and-translate actuator, optional single-acting spring return type (fail-safe type)

Valve Plate Opening (Wafer Size Compatibility)

Standard SEMI specifications: 46 x 236 mm (compatible with 8-inch / 200 mm wafers), 50 x 336 mm (compatible with 12-inch / 300 mm wafers), with support for non-standard customization

Valve Plate Sealing Type and Material

Standard FKM fluoroelastomer bonded seal; optional FKM groove-mounted seal, FFKM perfluoroelastomer seal, / snap-in groove installation

Static Seal Material

Bonnet: fixed seal with standard FKM O-ring, optional FFKM O-ring

Dynamic Seal Type

Welded metal bellows type (AM350/SUS316L stainless steel material)

Actuator Configuration

Double-acting pneumatic actuator, with standard electrical signal feedback

Air Supply Port Specification

Φ4 push-in fitting, standard flow control valve with indicator

Cylinder Volume

Standard 8-inch / 12-inch specification: 0.25 L

Drive Air Supply Requirements

Operating pressure 0.4-0.7 MPa (4-7 bar), recommended operating pressure 0.55 MPa (5.5 bar), maximum allowable overpressure: 100 psi (6.9 bar);

Opening and Closing Response Time

Opening ≤1.0 sec; closing ≤1.0 sec

Operating Pressure Range

1×10E-9 mbar to 1.1 bar (abs)

Valve Plate Differential Pressure Withstand

Maximum differential pressure withstand in closing direction: 1 bar; maximum differential pressure withstand in opening direction: ≤0.1 bar (100 mbar); maximum allowable differential pressure during opening: ≤0.1 bar;

Overall Leak Rate (Valve Seat + Valve Body)

Helium mass spectrometer leak detection rate: <1×10-9 mbar·L/s

Cycle Life Before First Maintenance

≥2,000,000 cycles

Bake-Out Temperature

Standard valve body ≤80°C; aluminum alloy version without electrical components 150°C / stainless steel version ≤200°C

Main Body Material

Valve body / valve plate: stainless steel SUS 304/SUS 316L, AL6061 aluminum alloy (hard anodized) / electroless nickel plated; bellows assembly: SUS 316L/AW350; moving mechanism: SUS 304 / stainless iron

Installation Location

Any orientation

Core Features

Particle-free, vibration-free L-motion design, suitable for semiconductor load-lock vacuum and atmospheric isolation applications