Drive Type

Pneumatic double-acting actuator, optional 3-position pneumatic control (intermediate-position model)

Dimensions

DN100, DN150, DN200, DN250, DN300, DN400, DN500

Flange Type

ISO-F fixed flange, CF ultra-high vacuum knife-edge flange, optional ISO-K vacuum flange

Material

Valve body / valve plate: AL 6061 aluminum alloy, SUS 304/SUS 316L stainless steel; moving mechanism: SUS 304/SUS 316L stainless steel; seals: standard FKM fluoroelastomer, optional FFKM perfluoroelastomer

Operating Pressure Range

1×1E-8 mbar abs to 1200 mbar abs (1.2 bar abs)

Maximum Differential Pressure Withstood by Valve Plate

≤1200 mbar (1.2 bar), bidirectional withstand

Minimum Opening Differential Pressure

≤30 mbar (0.03 bar)

Maximum Pressure

1.2 bar (abs)

Conductance

DN100: ≥10000 L/s; DN200: ≥35000 L/s; DN400: ≥90000 L/s

Overall Leak Rate

Valve body helium mass spectrometer leak detection rate <1×10-9 mbar·L/s

Opening and Closing Time

DN100-DN200: ≤3 s; DN250-DN400: ≤8 s; DN500: ≤12 s

Cycle Life Before First Maintenance

≥1,000,000 cycles under standard clean operating conditions

Drive Air Supply Requirements

Operating pressure range: 4-7 bar; recommended operating pressure: 5-6 bar

Temperature Resistance

Valve body temperature resistance: aluminum alloy valve body ≤120°C, stainless steel valve body ≤200°C; actuator temperature resistance: ≤80°C; position indicator temperature resistance: ≤80°C; standard solenoid valve / solenoid temperature resistance: ≤50°C; bake-out temperature: aluminum alloy valve body ≤120°C, stainless steel valve body ≤200°C

Control and Feedback Configuration

Standard: 5/2-way solenoid valve, mechanical visual position indicator, dual-position proximity switch / photoelectric switch feedback signal; optional: explosion-proof solenoid valve / feedback device, 3-position pneumatic control module

Cylinder Volume

DN100-DN200: 2.5 L-5 L; DN250-DN400: 5 L-10 L

Reference Weight

DN100: 25-40 kg; DN200: 60-90 kg; DN400: 110-180 kg

Installation Location

Any orientation, with no installation direction restrictions

Core Design Features

1. Swing-type pendulum structure, with no friction and no particle generation; 2. Split design, supporting in-line maintenance without disconnecting the pipeline; 3. Compact structural design, greatly saving installation space; 4. High flow, low flow resistance design, suitable for large vacuum systems