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  • 高真空插板阀HV.png

High vacuum gate valve (HV)

Category:

Product Description

Item

Technical Specifications

Drive Type

Manual / Pneumatic

Dimensions

DN63 ... DN320

Flange Type

ISO, JIS, ASA, CF

Feedthrough

Welded bellows seal or O-ring seal

Valve Plate Seal

Viton O-Ring / Kalrez O-Ring / EPDM

Bonnet Seal

Viton O-Ring

Response Time

≤2 s (DN63-DN100), ≤5 s (DN120-DN200), ≤7 s (DN250-DN320)

Operating Pressure Range

DN63-200: 1×1E-10 mbar to 1600 mbar; DN250-320: 1×1E-10 mbar to 1200 mbar

Opening Differential Pressure

≤ 30mbar

Valve Plate Differential Pressure

DN63-200: ≤1600 mbar; DN250-320: ≤1200 mbar

Leak Rate

Valve body: <1×10-9 mbar·L/s; valve seat: <1×10-9 mbar·L/s

Number of Cycles Before First Maintenance

200,000 (≤DN120), 100,000 (DN160-DN320)

Valve Body Temperature

≤120°C

Actuator Temperature

≤80°C

Solenoid Valve Temperature

≤50°C

Position Indicator Temperature

≤80°C

Material

Valve body (6061-T651); actuator (6061-T651)

Installation Location

Any (no restriction)

Operating Pressure (N2)

4-7 bar