Dry Adsorption
Category:
Product Description
Product Parameters
•Dry Adsorption of exhaust gas treatment equipment is to achieve the treatment purpose by filtering the target gas through specially designed adsorbents.
•Applicable places: Semiconductor Dry Etch, lon Implantation, Cleaning Gas, Gas Room etc...
Features and Characteristics:
Extremely high efficiency, the target gas can reach zero detection after treatment.
No uncontrollable by-product pollutants are produced, no secondary pollution, more thorough.
Extremely low power consumption, more energy saving.
Passive absorption, no waste.
Simple equipment, easy maintenance, low maintenance cost, more stable operation
| Process Principle | Dry Adsorption |
| Equipment Model | SADRY-50~200 |
| Processing Capacity | 50~200 LPM |
| Equipment Size | 700*700*1600mm |
| Equipment Weight | Approximately 200~400 kg |
| Power Specification | AC380V, 10A |
| Average Power | 2 kw |
| Application Process | Laboratory, Gas Canister purging and Implant process, etc. |
Address: Building B4, Taihu Bay Information Technology Industrial Park, No. 688, Zhenze Road, Economic Development Zone, Wuxi, Jiangsu Province
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