Product Description
Product Parameters
• Body Material: Aluminum or Stainless Steel
• Compact Design
• Easy maintenance with repair parts kit
• Applications: Transfer and process chamber isolation in semiconductor systems, suitable for wafers less than 450mm
| Conditions and specifications | Delivery valve | |||
| size | 32 X 222/46 X 236/50 X 336/56 X 496（mm） | |||
| material | valve body | Aluminum or Stainless steel | ||
| valve | AI6061 | |||
| Bonnet & Brake | AI6061 | |||
| feedthrough | Welded Bellows | |||
| drive system | STS304/AL6061/Etc | |||
| Seal Material | valve | AITON | ||
| valve seat | VITON O-Ring | |||
| Bonnets | VITON O-Ring | |||
| Airbox Capsules | AM-350 | |||
| leak rate | Valve Body, Seat | ＜1 X 10-5 mbar.l/s | ||
| Pressure range | Pressure range | 1 X 10-5 mbar to 1.4 bar (abs) | ||
| Differential pressure on the valve plate | ≤1.4 bar in either direction | |||
| Temperature Bellows Capsules | Bodies and valves | Stainless | ≤ 200°C | |
| Aluminum | ≤ 150°C | |||
| drives | ≤ 150°C | |||
| position sensor | ≤ 80°C | |||
| Service life and mounting location | service life | 1,000,000 Cycles | ||
| On/Off Move | vibration-free | |||
| mounting position | Any position | |||
| work pressure | Compressed air or N2 | 4~7 kgf/cm2 | ||
| position indicator | D-sub 9pin | DC24V,5~40mA | ||
Business License
Address: Building B4, Taihu Bay Information Technology Industrial Park, No. 688, Zhenze Road, Economic Development Zone, Wuxi, Jiangsu Province
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