Product Description
Product Parameters
•Body Material: Aluminum or Stainless Steel
•Compact Design
•Easy maintenance with service parts kit
•Applications: Transfer and process chamber isolation in semiconductor systems, suitable for wafers less than 450mm
| Valve Type | L-MOTION |
| operating mode | aerodynamic |
| Flange Size (ID) | 32X222/46X236/50X336/56X49 |
| feedthrough | Welded Bellows |
| Bonnet Seal | Viton 0-Ring/Vulcanized Seal |
| Bonnet Seal | Viton 0-Ring |
| response time | ≤2 sec |
| Work stress Fan State | 1 x10E-8 mbar to 1200 mbar |
| Differential pressure at opening | ≤30 mbar |
| Differential pressure on the door between | ≤1200 mbar |
| leak rate | stainless steels:1x10E-9 mbar lsec aluminium:1x10E-9mbar lsec |
| service life |
≥ 1,000,000 |
| Valve body temperature | ≤200℃ |
| Actuator temperature | ≤80°C |
| Temperature resistance of metal parts | ≤200°C |
| material | 304 stainless steel/hard anodised aluminium |
| mounting position | Any position |
| Working pressure (N2) | 4~7 bar |
Business License
Address: Building B4, Taihu Bay Information Technology Industrial Park, No. 688, Zhenze Road, Economic Development Zone, Wuxi, Jiangsu Province
Follow us