Product Description
Product Parameters
• Multi-position valves are crucial in applications such as the semiconductor industry that require both pressure control and conductivity.
• Uses a pneumatic solenoid valve with a position transmitter to control fully open and fully closed positions.
• All position controls are operated by the controller.
• Capable of remote control operation via interface.
| Valve Types | Multi-position vacuum slide valve |
| Operating Mode | Pneumatic |
| Flange Size (ID) | 2.5"~12" |
| Flange Type | ISO, JIS, ASA, CF |
| Feedthrough | Welded bellows |
| Seal | Viton O-Ring / Kalrez O-Ring /EPDM |
| Valve Cover Seal | Viton O-Ring |
| Response Time | ≤2 sec |
| Operating Pressure Range | 2.5"~6": 1x10E-10 mbar to 1400mbar |
| 8"~12":1x10E-10mbar to 1200mbar | |
| Differential Pressure at Opening | ≤30 mbar |
| Pressure Difference the Valve Plate Can Withstand | 2.5"~6":≤ 1400 mbar/8"~12":≤ 1200 mbar |
| Leakage Rate | <1x10.10 mbar I/sec |
| Service Life Before First Maintenance | 200,000 |
| Valve Body Temperature | ≤200°C |
| Actuator Temperature | ≤60°C |
| Metal Parts Temperature Resistance | ≤150°C |
| Material | Valve Body: 304 Stainless Steel / 316L Stainless Steel |
| Actuator: Aluminum Alloy 6061 - Hard Anodized | |
| Installation Position | Any position |
| Working Pressure (N2) | 4~7 bar |
Business License
Address: Building B4, Taihu Bay Information Technology Industrial Park, No. 688, Zhenze Road, Economic Development Zone, Wuxi, Jiangsu Province
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